JPH0238463U - - Google Patents
Info
- Publication number
- JPH0238463U JPH0238463U JP11423288U JP11423288U JPH0238463U JP H0238463 U JPH0238463 U JP H0238463U JP 11423288 U JP11423288 U JP 11423288U JP 11423288 U JP11423288 U JP 11423288U JP H0238463 U JPH0238463 U JP H0238463U
- Authority
- JP
- Japan
- Prior art keywords
- cathode
- evaporation
- shield
- vacuum arc
- evaporation source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11423288U JPH0238463U (en]) | 1988-08-30 | 1988-08-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11423288U JPH0238463U (en]) | 1988-08-30 | 1988-08-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0238463U true JPH0238463U (en]) | 1990-03-14 |
Family
ID=31354794
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11423288U Pending JPH0238463U (en]) | 1988-08-30 | 1988-08-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0238463U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20090116765A (ko) * | 2007-03-02 | 2009-11-11 | 가부시끼가이샤 리켄 | 아크식 증발원 |
-
1988
- 1988-08-30 JP JP11423288U patent/JPH0238463U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20090116765A (ko) * | 2007-03-02 | 2009-11-11 | 가부시끼가이샤 리켄 | 아크식 증발원 |